Nitrogen trifluoride is an industrial special gas, which is mainly used as propellant (rocket), fluorinating agent, electron gas, plasma dry engraving and for doping, laser, optical fiber.
Pure NF3 gas is a colorless and odorless gas. When mixed with a certain amount of impurity gas, the color will turn yellow, and there will be moldy or pungent odors. NF3 gas is non-flammable, but can support combustion. When the temperature exceeds 350°C, nitrogen trifluoride gas will decompose slowly and produce strong oxidizing fluorine during decomposition. Therefore, it is a strong oxidant at high temperatures.
Nitrogen trifluoride is used as the fluorine source of the hydrogen fluoride-fluoride gas high-energy chemical laser. The effective part (about 25%) of the reaction energy between h2-O2 and F2 can be released by laser radiation. The HF-OF laser is The most promising laser among chemical lasers. Nitrogen trifluoride is an excellent plasma etching gas in the microelectronics industry. For silicon and silicon nitride etching, the use of nitrogen trifluoride has a higher etching rate than carbon tetrafluoride and a mixed gas of carbon tetrafluoride and oxygen. Rate and selectivity, and no pollution to the surface, especially in the etching of integrated circuit materials with a thickness of less than 1.5um, nitrogen trifluoride has a very excellent etching rate and selectivity, leaving no residue on the surface of the etched object It is also a very good cleaning agent. With the development of nanotechnology and the large-scale development of technology in the electronics industry, its demand will increase day by day.
Nitrogen trifluoride is a colorless, odorless, non-toxic and non-flammable gas. It is widely used in semiconductor processing, solar cell manufacturing and liquid crystal display manufacturing. It is mainly used as an etchant, cleaning agent, and fluorine for preparing WF6.化剂。 Chemical agent. It is also used as an oxidizer and propellant in rocket launches. The proportion of its application in different application fields is as follows:
Source: Booz data collation
According to the "2018-2023 China Nitrogen Trifluoride (NF3) Market Analysis and Investment Prospects Research Report" released by Boss Data, the development of the national nitrogen trifluoride industry is generally divided into three stages: the first is used in the defense industry, mainly in a small amount Production for self-use; followed by the rapid development of the industrialization of nitrogen trifluoride at the end of the last century, and the emergence of nitrogen trifluoride for the electronics industry; the third stage is the rapid development of the electronics industry in recent years. Nitrogen trifluoride production lines have been put into production one after another, and its manufacturing level has reached the level of developed countries abroad.